| 摘要 |
A micro movable device is provided to realize good packaging by using insulation liquid of low viscosity or insulation gas of low viscosity as filler. A micro movable device(X1) includes a driving unit(10), a frame(20), and a connecting unit. The driving unit includes a main body, a first capacitor patterned electrode and a first driving patterned electrode. The first capacitor patterned electrode has a plurality of electrode teeth. The electrode teeth are elongated from the main body. The first driving patterned electrode also has electrode teeth which are elongated from the main body. The frame a second capacitor patterned electrode and a second driving patterned electrode. The capacitor patterned electrode and the second driving patterned electrode have electrode teeth which are elongated toward the first capacitor patterned electrode and the first driving patterned electrode respectively. The connecting unit connects the driving unit and the frame.
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