| 摘要 |
An apparatus and a method for drawing slurry are provided to suppress micro scratch by utilizing small slurry particles in a CMP method. An apparatus for drawing slurry includes a float member(134) and a dip tube(139). The float member implemented in a drum containing the slurry is floated on the slurry. The dip tube, whose one side is coupled with the float member, draws slurry which is positioned at a higher portion of the slurry containing in the drum. The one side of the dip tube is moved along a surface of the higher portion of the slurry according to the float member. The one side of the dip tube includes a slurry inlet hole to inlet the slurry. The dip tube is coupled with the float member to expose the slurry inlet hole at a lower portion of the float member.
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