| 摘要 |
An apparatus and a method for coating a liquid material are provided to prevent coating non-uniformity by processing constantly dry speed of organic EL(Electro Luminescence) liquids outputted from a nozzle. An apparatus for coating liquid material includes a substrate support unit(11), a nozzle unit(14), and a movement unit(12). The substrate support unit supports substrates. The nozzle unit sprays liquid materials toward the substrate. The movement unit moves the nozzle unit along a main-scan direction in parallel with a main surface of the substrates and moves the substrates in parallel with the main surface or along a vertical sub-scan direction on the main-scan direction. The nozzle unit includes first and second nozzles. The first nozzle sprays first liquid materials on a coating area of the substrates by spraying the first liquid materials and the volatile solvent through outlet holes thereof. The second nozzle, which is disposed at a rear side of the substrates in the sub-scan direction, sprays second liquid materials on the coating area of the substrates by spraying the volatile solvent and the second liquid materials equivalent to the volatile solvent.
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