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发明名称
PROCESS FOR DEPOSITION OF AMORPHOUS CARBON
摘要
申请公布号
EP1960564(A1)
申请公布日期
2008.08.27
申请号
EP20050853811
申请日期
2005.12.13
申请人
UNITED TECHNOLOGIES CORPORATION
发明人
COOPER, CLARK, V.;MULLEN, MICHAEL, F.
分类号
C23C14/06
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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