| 摘要 |
PROBLEM TO BE SOLVED: To provide an adsorption plate capable of being highly accurately and inexpensively manufactured, even when the adsorption plate has large area, surely maintaining flatness of the adsorption plate with a simple structure, and generating substantially uniform adsorptive force on an adsorption surface of the adsorption plate. SOLUTION: This adsorption plate has a laminated body 13 constituted by laminating at least two sheets of metal flat plate bodies 3 and a plurality of spacers 6 disposed, keeping a space fixed in advance on an upper surface 17 side of the laminated body 13. The flat plate body 3 is provided with a plurality of through holes 4 formed, keeping fixed pitch. The plurality of through holes 4 formed in the flat plate body 3 communicate with a plurality of through holes 4 formed in an other flat plate body 3. The upper surface 17 of the laminated body 13 is brought into substantially linear contact with lower ends 6a of the spacers 6. COPYRIGHT: (C)2009,JPO&INPIT
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