| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing apparatus for suppressing moisture absorption of a body to be processed. SOLUTION: The plasma processing apparatus has a plasma processing chamber, a vacuum conveyance chamber, a lock chamber, and an atmosphere-side conveyance chamber, wherein the humidity in the atmosphere-side conveyance chamber is adjusted by introducing dry air into the atmosphere-side conveyance chamber. COPYRIGHT: (C)2009,JPO&INPIT
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