FABRICATION METHOD OF FLEXIBLE DISPLAY

摘要

A fabrication method of a flexible display substrate is provided to prevent a flexible film from deforming and reduce the thickness of the flexible film by forming a source and a drain, depositing amorphous silicon on a metal substrate, depositing the flexible film, and then etching the metal substrate. A fabrication method of a flexible display substrate includes the steps of: depositing a silicon(12) on one surface of a metal substrate(11) withstanding at 500°C, and etching the silicon; forming a source(14) and a drain(15) by depositing a conductor thereon; forming a polymer insulator(17) thereon; and etching the metal substrate to make a gate. The conductor for forming the source and the drain is Al or a Cu.