| 摘要 |
An angular velocity sensor and a manufacturing method thereof are provided to improve operation efficiency of the angular velocity sensor by increasing inertia of a vibrator. An angular velocity sensor includes a vibrator having a base unit(10) and plural arm units(12), which are elongated from the base unit. Two of the arm units, which are driven with respect to each other, have first and second end portions. The first end portions(22) of the arm units, which are opposed to the base unit, are wider than the second end portions, which are connected to the base unit. The first end portions are protruded toward opposed sides of the two arm units. The two arms have a step difference at the first end portions. |
