POSITION VARIABLE UNIT FOR TARGET AND PULSE WAVE LASER DEPOSITION EQUIPMENT HAVING THE SAME

摘要

A position variable unit for a target is provided to increase the efficiency of a target by extending a stroke region of a target struck by laser light. A target fixing body(200) has target holders to which a target is fixed wherein the target holders are radially arranged with respect to the center of the target fixing body. A first driving part is connected to the center of the target fixing body by a first rotation axis to rotate the target fixing body. Second driving parts are connected to each center of the target holder to rotate each target holder. A control part controls the first and second driving parts in a manner that the target holder is rotated while the target fixing body reciprocates within the rotation range of the width of the target holder. A position variable unit varies a distance between the first rotation axis and the target holder on the target fixing body, connected to the target holder. A light irradiation part(300) can irradiate laser light toward the target. The control part can transmit an electrical signal to the first driving par to rotate the target fixing body so that the laser light is irradiated to the target.