NITRIDING METHOD FOR DECREASING COEFFICIENT OF FRICTION BY BIAS POST-PLASMA

摘要

A bias post plasma nitridization method is provided to increase the quality of a product used as automotive and mechanical components by improving the wear-resistance characteristic by a plasma nitridization process. After the temperature of the inside of a furnace is increased to 400-600 °C at a pressure of 1x10^-3 torr, the temperature of the furnace is maintained for a time interval of 30 minutes(S10). After power is applied to a sample and a screen net installed outside the sample to generate plasma, Ar and H2 are injected and the temperature of the furnace is maintained for a time interval of one hour while the inside of the furnace maintains a pressure less than 1.25 torr or lower so that the sample is ion-etched(S20). While the inside of the furnace is maintained at a pressure of 2 torr, nitrogen, hydrogen and H2S are injected to perform a plasma nitridization process on the sample for a time interval of 2 hours wherein the nitrogen and hydrogen are injected in the ratio of 1:3-3:1(S30). Nitrogen is injected into the furnace to cool the sample(S40).