发明名称 |
Lighting optical machine and defect inspection system |
摘要 |
A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam deflection mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam deflection mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.
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申请公布号 |
US7417720(B2) |
申请公布日期 |
2008.08.26 |
申请号 |
US20060522399 |
申请日期 |
2006.09.18 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
IIZUKA MASAMI;MATSUI SHIGERU;SUZUKI TADASHI;GOTO HIROSHI;ONO TAKAYUKI |
分类号 |
G01N21/00;G01N21/84;G01N21/21;G01N21/95;G01N21/956;H01L21/027;H01L21/66 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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