MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION OF FLAT PANEL DISPLAY AND DEPOSITING EQUIPMENT OF THE SAME

摘要

A mask frame assembly for thin film deposition of a flat film display and deposition equipment using the same are provided to implement light weight by having a frame of a double structure, thereby achieving handling efficiency and contributing to improvement of mass productivity by reducing weight loads of a transfer device disposed within a chamber of the deposition equipment. A pattern mask(200) has a pattern unit(210) including plural opening units. A first frame(100) supports and is coupled with a lower edge part of the pattern mask. A second frame(110) is coupled with the first frame as being horizontally or vertically corresponded. The second frame is formed from one of metal or alloy having mass smaller than material configuring the first frame. The pattern mask is SUS or invar.