OPTICAL PATH MODIFICATION UNIT, MODULE, METHOD FOR EXTRACTING HIGH RESOLUTION IMAGE AND RECORDING MEDIUM RECORDING A PROGRAM FOR PERFORMING THE SAME AND APPARATUS FOR INSPECTING PATTERN ON SEMICONDUCTOR SUBSTRATE

摘要

According to an embodiment of the present invention, an optical path converting unit for extracting a high resolution image is a unit for extracting a second image having a second resolution higher than a first resolution based on a first image having the first resolution obtained through light which is irradiated from a light source and is incident in an image sensor through a subject whose position is fixed.