CONTROL SYSTEM AND METHOD FOR NEGATIVE DAMPING COMPENSATION IN MAGNETIC LEVITATION

摘要

A magnetic levitation control system (100) includes a sensor (106) configured to measure a gap between an electro magnet and a stage and generate a gap measurement signal. A gap filter (112) is configured to receive the gap measurement signal and provide a phase lead signal which estimates and accounts for delays between the gap measurement signal and a compensation action. An estimation block (114) is configured to receive the phase lead signal and provide the compensation action in accordance with the phase lead signal such that negative stiffness and negative damping effects are compensated for in the control system.