CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technology capable of deleting a magnetic history in a short time in parallel with a processing of a stage movement or the like. SOLUTION: A deleting sequence of magnetic histories is executed in which a current to be impressed on an electromagnetic coil before obtaining an image is always set at a constant change volume against a target value, and information on an image or the like is obtained when a spot diameter of a primary electron beam focused on a sample gets smaller than a size which can be displayed with one pixel of an image obtained. COPYRIGHT: (C)2008,JPO&INPIT