| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe capable of preventing breakage of a contact end of an electrode and damages to an object body to be probed. SOLUTION: The contact probe comprises a center electrode 4a and an outer electrode 3a that are disposed so as to allow movement relative with respect to a base part 2a in the probing directions (directions of the arrows A and B), and that are mutually insulated; a spring 6a energizing the center electrode 4a and the outer electrode 3a in the directions opposite to the probing directions; and a spring 5a energizing the outer electrode 3a and a base part 2 in the directions opposite to the probing directions. The outer electrode 3a includes a base part member 31 energized by the spring 5a; a tip part member 32 in which a contact end is formed; and a spring 33 energizing the base part member 31 and the tip part member 32 in the directions opposite to the probing directions. COPYRIGHT: (C)2008,JPO&INPIT
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