BONDED STRUCTURE, BONDING METHOD, LIQUID DROPLET DISCHARGE HEAD AND METHOD FOR PRODUCING LIQUID DROPLET DISCHARGE HEAD

摘要

PROBLEM TO BE SOLVED: To obtain a bonded structure that relaxes a stress occurring at a bonded interface and has improved adhesion reliability and durability and to provide a bonding method, a liquid droplet discharge head and a method for producing a liquid droplet discharge head. SOLUTION: The bonded structure comprises a nozzle substrate 11 laminated through an adhesion layer 23 to a flow channel forming substrate 12 in which the adhesion layer 23 has a plurality of adhesion parts 23a dispersed and arranged in the adhesion region of the flow channel forming substrate 12. COPYRIGHT: (C)2008,JPO&INPIT