| 发明名称 |
SILICONE COATING COMPOSITION |
| 摘要 |
The present invention relates to a composition comprising: (a) a polymer having at least one repeating unit of formula where R<SUP>1 </SUP>is a non-hydrolysable group and n is an integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful in forming low k dielectric constant materials and as well as hard mask and underlayer materials with anti-reflective properties for the photolithography industry.
|
| 申请公布号 |
US2008196626(A1) |
申请公布日期 |
2008.08.21 |
| 申请号 |
US20070676673 |
申请日期 |
2007.02.20 |
| 申请人 |
WU HENGPENG;KIM WOOKYU;ZHUANG HONG;LU PINGHUNG;NEISSER MARK;ABDALLAH DAVID;ZHANG RUZHI |
发明人 |
WU HENGPENG;KIM WOOKYU;ZHUANG HONG;LU PINGHUNG;NEISSER MARK;ABDALLAH DAVID;ZHANG RUZHI |
| 分类号 |
G03C1/46;C04B28/26;C08G77/20;G03C8/00 |
主分类号 |
G03C1/46 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
