| 发明名称 |
RETAINING RING WITH SHAPED SURFACE |
| 摘要 |
A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.
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| 申请公布号 |
US2008196833(A1) |
申请公布日期 |
2008.08.21 |
| 申请号 |
US20080049650 |
申请日期 |
2008.03.17 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHEN HUNG CHIH;ZUNIGA STEVEN M.;GARRETSON CHARLES C.;MCALLISTER DOUGLAS R.;LIN JIAN;MEYER STACY;HUEY SIDNEY P.;OH JEONGHOON;DOAN TRUNG T.;SCHMIDT JEFFREY;WOHLERT MARTIN S.;HUGHES KERRY F.;WANG JAMES C.;LU DANNY CAM TOAN;DE LAMENIE ROMAIN BEAU;BALAGANI VENKATA R.;ALLEN ADEN MARTIN;FONG MICHAEL JON |
| 分类号 |
H01L21/306;B24B1/00;B24B37/04;B24B37/32;B24B41/06 |
主分类号 |
H01L21/306 |
| 代理机构 |
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