| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern modifying apparatus which can modify a disconnected electrode with a thin line that has a size of about 10μm, having less contamination at the peripheries of defect parts. SOLUTION: In the pattern modifying apparatus, a hole 3a made in a film 3 is made to face a defect part 2a of an electrode 2 with a gap G defined therebetween, the film 3 is pushed against a substrate 1, at a predetermined surface pressure so that the hole 3a is closed with a flat surface 9a of a tip end of a coating needle 9 having a modifying past 10 applied thereon; the modifying paste 10 is applied onto the defect part 2a; and then the coating needle 9 is retracted and the film 3 is made to peel off from the substrate 1 by the restoring force of the film 3. Consequently, due to the capillary phenomenon the modifying paste 10 can be prevented from infiltrating a gap between the film 3 and the substrate 1. COPYRIGHT: (C)2008,JPO&INPIT
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