| 摘要 |
An integrated circuit and method including an isolation arrangement. One embodiment provides a substrate having trenches and mesa regions and also auxiliary structures on the mesa regions. A first isolation structure covers side walls and a bottom region of the trenches and at least partially side walls of the auxiliary structure. A liner on the first isolation structure fills the trenches and gaps between the auxiliary structures with a second isolation structure; and the second isolation structure is pulled back, wherein upper sections of the liner are uncovered.
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