| 摘要 |
<p>Intended is to make it possible to detect only a true current by ions generated from the emitter of a corona discharge type ionizer, and to detect such a charge elimination current of the true current as actually contributes to the charge elimination of an object, thereby to confirm the contamination or deterioration degree, the charge eliminating performance and so on of the emitter.The corona discharge type ionizer has a ground electrode arranged near the emitter, to which a high voltage is applied. In this corona discharge type ionizer, the whole current to flow to the earth electrode and a first induced current by the high voltage applied to the emitter are simultaneously measured. A second induced current, which is a component of the whole current and which is caused to flow to the earth electrode by an electric field generated by the emitter, is estimated from the first induced current. The true current, which is generated by the ions generated by the emitter, is measured from the difference between the whole current and the second induced current.</p> |
