| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method for cross-section-processing and observing a three-dimensional sample. SOLUTION: In this cross-section processing method of the sample for cross-section-processing the three-dimensional sample and observing the obtained cross section with a focused ion beam processing observation device, a movable probe disposed in the device as a mask for protecting the sample surface just above the sample is used, the movable probe is arranged above the sample by 0.5-5μm, and the cross-section processing is performed. The movable probe is used while its tip is previously formed in a desired cross-section processing shape. COPYRIGHT: (C)2008,JPO&INPIT
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