| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor tester for inhibiting the number of transmission paths from increasing, improving a transmission speed of a signal, and preventing a delay between the transmission paths. SOLUTION: The semiconductor tester 100 generates a pattern signal from a pattern generator 112, converts the parallel signal into a serial signal, and transmits it to a test head 120. The pattern signal transmitted through a transmission cable 130 is processed so as to convert the serial signal into the parallel signal. Various types of the pattern signals are assigned with addresses, and stored in a phase control memory 124. A phase corresponding to the first pattern signal at the beginning of reading out is processed so as to detect the start address at which the same pattern signal is stored. The start address is initiated to be read out. The pattern signals are sequentially read out, and outputted to a DUT 150 so as to implement a test. COPYRIGHT: (C)2008,JPO&INPIT
|
