SPECIMEN FOR ANALYZING ELEMENT, METHOD FOR MANUFACTURING THE SAME AND METHOD FOR ANALYZING ELEMENT USING THE SAME

摘要

A specimen for analyzing an element, a method for manufacturing the same, and a method for analyzing the element using the same are provided to analyze ingredients of a reference specimen by using signals obtained through the irradiation of an electronic beam into a thin film for the reference specimen. A specimen(100) for analyzing an element includes a first rotational shaft(130), a second rotational shaft(140), a substrate(110) and a thin film(120). The first rotational shaft is spaced apart from the second rotational shaft in parallel to each other. The first and second rotational shafts are disposed on a stage of a device of analyzing elements. The substrate has a film form having flexibility such that the substrate is wounded around the first and second rotational shafts.