A PALSMA CLEANER MACHINE AND SYSTEM AND CONTROL METHOD FOR MANAGING OF PROCESS HISTORY WITH NONCONTACT TYPE RF IC CHIP

摘要

A plasma cleaner machine and system for managing process history using a non-contact type RF IC chip and a control method thereof are provided to allow a user to check usage history of material by using a magazine or a carrier equipped with the non-contact type RF IC chip. A plasma cleaner machine(100) for managing process history using a non-contact type RF IC chip(10) comprises a wireless RF IC chip reader(110) a storage unit(120), a wireless send/receive unit(130), and a control unit(140). The wireless RF IC chip reader recognizes the non-contact type RF IC chip, which is installed at a carrier or a magazine(30) to manage process history of plasma. The storage unit stores readout information and usage information of the wireless RF IC chip reader. The wireless send/receive unit is installed to send and receive the readout information of the wireless RF IC chip reader. The control unit is installed to control all operations of the plasma cleaner machine.