PREPARATION METHODS OF THE SELECTIVE NANOWIRE

摘要

A manufacturing method of nanowire selectively on a desired region is provided to obtain an arranged uniform zinc oxide nanowire in a desired region in a simple process by employing aluminum layer and photoresist layer on a silicone substrate. A manufacturing method of zinc oxide nanowire(14) selectively on a desired region comprises steps of: i) forming an aluminum layer(4) on a silicone substrate(2); ii) forming a photoresist layer(6) on the aluminum layer, followed by patterning the photoresist layer; iii) forming a porous aluminum oxide layer(8) by anodic oxidation of the aluminum layer after completion of patterning; iv) forming zinc oxide seed layer by painting zinc oxide seed(12) on the silicone substrate which has the porous aluminum oxide layer; v) removing the photoresist layer and the porous aluminum oxide layer in order after the step iv) is finished; and vi) growing the painted zinc oxide seed on the silicone substrate after the step v) is finished. In step iii), apertures(10) are formed on the aluminum layer in order to paint the zinc oxide seed on the surface of the silicone substrate.