发明名称 POLISHING ARTICLE WITH WINDOW STRIPE
摘要 A polishing member with a window stripe is provided to extend a lifetime of a sub pad to be longer than that of a polishing layer by preventing the sub pad from being eroded less than the polishing sheet or a polishing pad. A polishing member includes a polishing layer and a linear polishing sheet(110), which has a linear transparent region molded on the polishing layer. The polishing layer is formed of a non-fixed polishing material containing polyurethane having voids. An uppermost surface of the linear polishing sheet is arranged on the same plane as an uppermost surface of the linear transparent region. The linear transparent region contains the polyurethane without voids and is made of a flexible material, which passes between 2.5-inch-wide rollers with a 60 Shore D scale strength and without cracking.
申请公布号 KR20080075470(A) 申请公布日期 2008.08.18
申请号 KR20080072266 申请日期 2008.07.24
申请人 APPLIED MATERIALS INC. 发明人 BONNER BENJAMIN A.;MCREYNOLDS PETER;MENK GREGORY E.;PRABHU GOPALAKRISHNA B.;IYER ANAND N.;LEUNG GARLEN C.;ZUNIGA STEVEN M.;RONDUM ERIK S.;AU HENRY H.
分类号 H01L21/304;B24B37/20 主分类号 H01L21/304
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