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发明名称
消除晶挠曲的装置
摘要
提供一种用于消除晶圆挠曲之装置,其包括:晶圆支撑构件,其接触待标记之晶圆之底表面的边缘且支撑晶圆;按压构件,其经安置于晶圆支撑构件上,且经安装以能够在下降位置与上升位置之间移动,其中下降位置为按压构件藉由按压由晶圆支撑构件支撑之晶圆之上表面的边缘而向晶圆支撑构件按压晶圆,而上升位置为按压构件向上远离晶圆;以及驱动装置,其将按压构件升高至上升位置。
申请公布号
TW200834808
申请公布日期
2008.08.16
申请号
TW097100988
申请日期
2008.01.10
申请人
EO科技股份有限公司
发明人
曹永录;安炳敏
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
詹铭文;萧锡清
主权项
地址
韩国
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