发明名称 |
Focused anode layer ion source with converging and charge compensated beam (falcon) |
摘要 |
A focused ion source based on a Hall thruster with closed loop electron drift and a narrow acceleration zone is disclosed. The ion source of the invention has an ion focusing system consisting of two parts. The first part is a ballistic focusing system in which the aperture through which the beam exits the discharge channel is tilted. The second is a magnetic focusing system which focuses the ion beam exiting the discharge channel by canceling a divergent magnetic field present at the aperture through which the beam exits the discharge channel. The ion source of the invention also has an in-line hollow cathode capable of forming a self-sustaining discharge. The invention further reduces substrate contamination, while increasing the processing rate. Further the configuration disclosed allows the ion source to operate at lower operational gas pressures.
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申请公布号 |
US2008191629(A1) |
申请公布日期 |
2008.08.14 |
申请号 |
US20070704476 |
申请日期 |
2007.02.09 |
申请人 |
GUTKIN MICHAEL;BIZYUKOV ALEXANDER;SLEPTSOV VLADIMIR;BIZYUKOV IVAN;SEREDA KONSTANTIN |
发明人 |
GUTKIN MICHAEL;BIZYUKOV ALEXANDER;SLEPTSOV VLADIMIR;BIZYUKOV IVAN;SEREDA KONSTANTIN |
分类号 |
H01J27/00 |
主分类号 |
H01J27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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