| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method inexpensively and efficiently polishing an amorphous carbon coating. SOLUTION: In this method, while a polishing material 20 is pressed to a polishing face 12a of an amorphous carbon coating 12 containing hydrogen elements formed on a surface of a base material 11, the amorphous carbon coating 12 is polished. In this method, while lubricating oil 40 containing an additive reacting with carbon of the amorphous carbon coating 12 and generating carbon-base gas is supplied, the coating is polished. COPYRIGHT: (C)2008,JPO&INPIT
|
