| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a BAW resonator by which the quality of a piezoelectric thin film of the resonator can be improved. SOLUTION: The manufacturing method for the BAW resonator is characterized in that, on the main surface side of a support substrate, a low-acoustic-impedance layer 12a provided so as to cover the entire surface of the main surface side and a high-acoustic-impedance layer 12b patterned so as to correspond to each of a plurality of resonators 5 are layered alternately so that the top layer is a low-acoustic-impedance layer 12a, thereby forming an acoustic multilayer film; then a conductive layer 2 being a base of a lower electrode 20 is formed on the entire top surface side of the acoustic multilayer film 12 so that recessed parts 12c on the top surface are filled; then the surface of the conductive layer 2 on the opposite side from the acoustic multilayer film 12 is polished and flattened, and after that a piezoelectric material layer 3 being a base of the piezoelectric thin film 30 is formed on the top surface side of the conductive layer 2. COPYRIGHT: (C)2008,JPO&INPIT
|
