| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator capable of reducing a possibility of damaging the plasma generator by a thermal stress caused by the surrounding atmosphere and heat at the time of operation, and capable of cleaning excellently a fluid such as PM, an oxidizing component, and HC passing in a cell, and a manufacturing method of the plasma generator. <P>SOLUTION: The plasma generator is provided with a cell 6 consisting of a first electrode 1 of flat plate shape, a second electrode 2 of flat plate shape arranged opposed to the first electrode 1, and a pair of side walls 5 which are installed at the outer peripheral region of the opposed faces of these electrodes on a plan view and support the first electrode 1 and the second electrode 2 with a certain distance separated. A fluid flows in the cell 6 and a groove 7 is installed on the side wall 5. <P>COPYRIGHT: (C)2008,JPO&INPIT |
