发明名称 Test structure for seal ring quality monitor
摘要 A semiconductor structure includes a daisy chain adjacent to an edge of a semiconductor chip. The daisy chain includes a plurality of horizontal metal lines distributed in a plurality of metallization layers, wherein the horizontal metal lines are serially connected; a plurality of connecting pads in a same layer and electrically connecting the horizontal metal lines, wherein the connecting pads are physically separated from each other; and a plurality of vertical metal lines, each connecting one of the connecting pads to one of the horizontal metal lines, wherein one of the plurality of connecting pads is connected to one of the plurality of horizontal metal lines by only one of the plurality of vertical metal lines; and a seal ring adjacent and electrically disconnected from the daisy chain.
申请公布号 US2008191205(A1) 申请公布日期 2008.08.14
申请号 US20070706940 申请日期 2007.02.13
申请人 TSAI HAO-YI;HSU SHIH-HSUN;CHANG SHIH-CHENG;HOU SHANG-YUN;CHEN HSIEN-WEI;TSAI CHIA-LUN;LIU BENSON;JENG SHIN-PUU;WU ANBIARSHY 发明人 TSAI HAO-YI;HSU SHIH-HSUN;CHANG SHIH-CHENG;HOU SHANG-YUN;CHEN HSIEN-WEI;TSAI CHIA-LUN;LIU BENSON;JENG SHIN-PUU;WU ANBIARSHY
分类号 H01L23/58 主分类号 H01L23/58
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