| 摘要 |
PROBLEM TO BE SOLVED: To provide a clamping device of a stage change plate having simple structure capable of easily and accurately positioning and clamping the stage change plate to a tool base in the plane direction and the height direction. SOLUTION: In the clamping device, a first positioning member 4 for positioning the plane direction of the stage change plate 2 and a second positioning member 5 for positioning the height direction of the stage change plate 2 are separately provided between the stage change plate 2 and the tool base. Therefore, the stage change plate 2 can be easily and accurately positioned and clamped to the tool base 3 in the plane direction and the height direction. COPYRIGHT: (C)2008,JPO&INPIT
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