发明名称 PLASMA GUN
摘要 A plasma gun is provided to prevent burn of an insulation pipe of a recovering electrode unit by discharging gas to an end of the insulation pipe through a gas path formed at the recovering electrode unit. A plasma gun(9) comprises cathode units(1a,1f,1g), and recovering electrode units. The recovering electrode units are composed of a frame(1e), an insulation pipe(1h), and gas paths(91,92,93). The frame has an outlet of the plasma. The insulation pipe electrically insulates a surface of the outlet of the plasma. The gas paths discharge gas to an end of the insulation pipe.
申请公布号 KR100852114(B1) 申请公布日期 2008.08.13
申请号 KR20070018088 申请日期 2007.02.22
申请人 SAMSUNG SDI CO., LTD. 发明人 CHOI, YONG SUP;KIM, JIN PIL;LEE, KANG IL
分类号 C23C14/24;C23C14/00 主分类号 C23C14/24
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