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发明名称
DIELECTRIC INTERFACE FOR GROUP III-V SEMICONDUCTOR DEVICE
摘要
申请公布号
EP1955366(A1)
申请公布日期
2008.08.13
申请号
EP20060837855
申请日期
2006.11.17
申请人
INTEL CORPORATION
发明人
BRASK, JUSTIN, K.;DATTA, SUMAN;DOCZY, MARK, L.;BLACKWELL, JAMES, M.;METZ, MATTHEW, V.;KAVALIEROS, JACK, T.;CHAU, ROBERT, S.
分类号
H01L21/314;H01L21/28;H01L21/316;H01L21/335;H01L29/20;H01L29/49;H01L29/51;H01L29/778
主分类号
H01L21/314
代理机构
代理人
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