发明名称 Focusing-device for the radiation from a light source
摘要 A focusing-device for the radiation from a light source ( 2 ) is provided with a collector mirror ( 1, 1 ') which is arranged in a mount ( 24 ) and collects the light, in virtual or real terms, from the light source ( 2 ) at the second focus ( 200 ). The collector mirror ( 1, 1 ') is displaceably connected to the mount ( 24 ) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
申请公布号 US7410265(B2) 申请公布日期 2008.08.12
申请号 US20030675471 申请日期 2003.09.30
申请人 CARL ZEISS SMT AG 发明人 ANTONI MARTIN;MELZER FRANK;SEIFERT ANDREAS;SINGER WOLFGANG;EGLE WILHELM;GELLRICH BERNHARD;GEUPPERT BERNHARD
分类号 G02B5/08;G21K1/06;G02B5/10;G02B7/182;G02B17/02;G02B27/00;G02B27/30;G03F7/20;G21K5/00;G21K5/02;H01L21/027 主分类号 G02B5/08
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