| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser microfabrication method capable of solving problems of efficiency or the like that a beam is blocked by a mask in a projection lens image transfer system, problems of limitation in the resolution of a beam on a fabrication surface due to the beam characteristics relating to a direct drawing system, and problems of a low fabrication speed or the like upon scanning with a converged thin beam, although high resolution is obtained. <P>SOLUTION: A function of scanning the objective plane 16 of a projection lens 17 with a laser beam is provided so as to scan and irradiate transmissive patterns of a movable mask 101 according to various fabrication layouts of a sample 18. An image of the trace where the laser beam 25 passes through the irradiated pattern is transferred to the sample face 103 through the projection lens 17 to fabricate. Laser microfabrication is carried out by a device that can fabricate patterns in a single share at a time with different beam intensities required for thin film layers of various fabrication objects at various sites by moving various kinds of patterns preliminarily prepared on the mask 101 and scanning with a beam to be linked with the movement. <P>COPYRIGHT: (C)2008,JPO&INPIT |
