摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin type thermoelectric conversion module having superior durability and handling properties. <P>SOLUTION: With a polyimide film having a glass transition temperature of ≥300°C, a tensile elastic modulus of 5-20 GPa, and a coefficient of linear expansion of -3 to +8 ppm/°C as a base material, a thermoelectric conversion element is sandwiched by a module substrate where a metal electrode is formed by a sputter plating method, a method for etching metal foil after lamination, or an additive method as the thermoelectric conversion module. <P>COPYRIGHT: (C)2008,JPO&INPIT |