摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel polymer compound which has a high fluorine content and shows a good balance among various performances of high solvent solubility, alkaline developer solubility, adhesion, high hardness and high polarity (compatibility). <P>SOLUTION: The fluorine-containing polymer compound comprises a fluorine-containing vinyl monomer and a fluorine-containing acrylate monomer. The polymer exhibits excellent performances, particularly when it is used as a thin film which is made from a coating composition prepared by dissolving the polymer in a solvent. When the polymer compound has an OH group, the OH group may be acryloylated to form a thin film having a higher hardness. <P>COPYRIGHT: (C)2008,JPO&INPIT |