REAGENT DISPENSING APPARATUS AND DELIVERY METHOD

摘要

This invention relates to a vapor or liquid phase reagent dispensing apparatus comprising a vessel (40) which comprises a removable top wall member (20), a sidewall member (22) and a bottom wall member (26) configured to form an internal vessel compartment; said sidewall member (22) having a protuberance (24) that extends into the internal vessel compartment adjacent to the top wall member (20); said top wall member (20) and said protuberance (24) having opposing flat surfaces, wherein the opposing flat surfaces are not in contact with one another and at least a portion of the opposing flat surfaces are hardened (30); and a metal seal (10) aligned and in contact with the hardened opposing flat surfaces (30) of said top wall member (20) and said protuberance (24). The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.