MANUFACTURING METHOD OF FIELD EMISSION ARRAY

摘要

A method for manufacturing a field emission device is provided to form a pattern by performing an imprinting process using a super ionic conductor. A conductive substrate and a silver plate are dipped into an electrolyte including silver ions and a carbon nanotube(S112). A magnetic material layer including the silver and the carbon nanotube on one surface of the conductive substrate is formed by applying a voltage to the conductive substrate and the silver plate(S114). A stamper including a super ionic conductor is loaded(S120). A predetermined embossed pattern is formed on one surface of the stamper. An electrode is formed on the other surface of the stamper. The embossed pattern comes in contact with the magnetic material layer(S130). A positive voltage is applied to the electrode and a negative voltage is applied to the magnetic material layer(S140).