APPARATUS FOR TRANSFERRING SUBSTRATE

摘要

A substrate transfer apparatus is provided to individually disassemble or assemble each component in maintenance or replacement thereof by being formed of a plurality of unit transfer apparatuses. A substrate transfer apparatus(20) includes unit transfer apparatuses(100). Each of the unit transfer apparatuses has a unit block(110), a rotary shaft(130), a roller(120), and a driving member. The rotary shaft is installed by passing through the unit block. The roller is connected to one side of the rotary shaft. The driving member is installed at the other side of the rotary shaft to rotate the rotary shaft. The unit transfer apparatuses are arranged along a longitudinal edge of a process chamber so that the rollers face each other inside the process chamber.