| 摘要 |
A substrate drying method and an apparatus for performing the same are provided to supply dry air by removing moisture of air within a drying chamber, thereby improving drying efficiency. An object is inputted into a drying chamber. By providing drying air to the object, the object is dried(S2). Moisture included in the air is removed by ventilating the air within the drying chamber while drying the object(S4). The object is dried by re-providing drying air, in which the moisture is removed, to the object(S5). The above third step comprises the following steps. The air within the drying chamber is discharged to the outside(S3). The air is cooled up to temperature at which moisture included in the air is condensed. After that, the air in which the moisture is removed is induced into the drying chamber. |
