VERTICAL MICRO CONTACT PROBE WITH VARIABLE STIFFNESS

摘要

A vertical micro contact probe is provided to change the stiffness of the micro contact probe by arranging a stopper on the contact probe. A vertical micro contact probe with a variable stiffness includes a probe body, a head unit, and a stopper(S). Plural unit shapes, on which two circles with different diameters are formed, are laminated in opposite directions with respect to each other to form the probe body. The head unit is formed on the probe body and contacted with an electrode pad of a semiconductor chip. When compressed, the stopper is contacted with the probe body and supports the probe body. The circle with a bigger diameter is arranged outside the probe body.