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发明名称
HEAT TREATMENT METHOD, HEAT TREATMENT APPARATUS AND METHOD OF CALIBRATING THE APPARATUS
摘要
申请公布号
KR100850396(B1)
申请公布日期
2008.08.04
申请号
KR20057006725
申请日期
2005.04.19
申请人
发明人
分类号
C23C16/52;H01L21/205;F27D19/00;F27D21/00;H01L21/00;H01L21/22;H01L21/324
主分类号
C23C16/52
代理机构
代理人
主权项
地址
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