| 摘要 |
<p>Example embodiments relate to a gas box module for supplying a process gas into a semiconductor device manufacturing equipment. The gas box module may include a component adapted to supply the process gas into a process chamber and a block part. The component may have a first mating portion, and the block part may have a second mating portion adapted to correspond to the first mating portion, so as to align and secure the component to the block part.</p> |
