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经营范围
发明名称
Scatterometer
摘要
申请公布号
KR100849370(B1)
申请公布日期
2008.07.31
申请号
KR20007009218
申请日期
2000.08.21
申请人
KONINKL PHILIPS ELECTRONICS NV
发明人
WADMAN SIPKE
分类号
G01B11/30;G01N21/27;G01N21/47;G01N21/84
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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