| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a horizontally located angular velocity sensor element hardly affected by an acceleration in a lateral direction, easy in fixing a fixed section. <P>SOLUTION: The angular velocity sensor element includes a fixed section 20 fixed on the surface of a sensor element support part 41 of a case 4, an upper connection arm 21 and a lower connection arm 22 connected to both sides of the fixed section 20, a pair of upper detection arms 23 connected to the upper connection arm 21, piezoelectric elements 23A, 23B formed on the surface of each upper detection arm 23, a pair of lower detection arms 24 connected to the lower connection arm 22, piezoelectric elements 24A, 24B formed on the surface of each lower detection arm 24, upper driving arms 25 connected to each upper detection arm 23, piezoelectric elements 25A, 25B formed on the surface of each upper driving arm 25, lower driving arms 26 connected to each lower detection arm 24, and piezoelectric elements 26A, 26B formed on the surface of each lower driving arm 26. <P>COPYRIGHT: (C)2008,JPO&INPIT |
